Precisely positioned generation of CsPbBr3 nano-light sources in a Cs4PbBr6 film by electron beam irradiation

Integration of high-quality photon emitters at specific locations within nanophotonic structures or optoelectronic devices is a key to innovating on-chip optical control and quantum technologies. Halide perovskite nanoparticles have great potential as single photon emitters with high quantum efficiency. To achieve their full potential, they must be embedded in a host material that ensures chemical stability and passivates surface defects. A previous experiment on a CsPbBr3-Cs4PbBr6 nanocomposite film suggested possibility that electron beam irradiation can be used to control positions of CsPbBr3 nano-light sources in the Cs4PbBr6 host although the effects of electron beam irradiation are not fully understood. Here, we fabricate a Cs4PbBr6-CsBr film, not containing the CsPbBr3 phase, and provide direct evidence that CsPbBr3 nanoparticles can be locally generated in the Cs4PbBr6 host by irradiation with a focused electron beam. We further demonstrate perovskite nano-light source arrays with submicron spacing using this method.