Anomalous Platinum and Oxygen Transport during Electroforming of NbOx Memristors

Electroforming of metal-oxide-metal memristors is generally attributed to the creation of oxygen-vacancy filaments within the oxide, with noble metal electrodes such as Pt and Au remaining chemically inert. Here, we demonstrate that electroforming and subsequent operation of Pt/NbOx/Nb2O5/Pt devices can induce an unexpected and highly correlated redistribution of both oxygen and platinum. Time-of-flight secondary ion mass spectrometry reveals a filamentary pathway characterized by micrometer-scale oxygen enrichment extending from the Nb2O5 layer through NbOx and deep into the Pt top electrode. Surprisingly, this is accompanied by the formation of a Pt-rich filament penetrating the oxide stack along the same filamentary path. Finite-element and lumped-element modelling show that current-controlled negative-differential-resistance operation produces localized Joule heating and high-frequency thermal cycling, which strongly enhances oxygen migration and enables thermally assisted Pt diffusion along vacancy-rich pathways. These findings reveal a previously unrecognized metal-ion transport mechanism in NbOx memristors and highlight the critical role of post-forming electrical dynamics in determining filament chemistry, stability, and device reliability.