Resolving the Blueshift in Calculations of the EUV Spectrum of Multiply Charged Tin Ions

M. L. Reitsma, J. Sheil, O. O. Versolato, E. V. Kahl, J. C. Berengut

arXiv:2606.04868·physics.atom-ph·Published 2026-06-03

We report ab initio relativistic calculations on the complex open shell Sn$^{12+}$ highly charged ion, a prototypical plasma ion relevant for extreme ultraviolet (EUV) nanolithography. Previous calculations of EUV emissivity in tin plasmas consistently generate a spectrum in which the region of peak emissivity is blueshifted relative to experiment. By optimising our numerical methods to take full advantage of modern, high-performance CPU architectures, we are able to completely saturate the configuration interaction within the $n=4$ shell. Coupled with a thorough treatment of core-valence correlation we resolve the blueshift, finding a surprisingly large influence of highly excited states on the spectrum that is dominated by multiply excited states.

TopicsQuantum Chemistry & Force Fields

Tagsab-initio excited-states

arXiv categoriesphysics.atom-ph, physics.plasm-ph

arXiv abstract pagePDF